EUV: The Most Precise, Complex Machine at Intel

‘Behind this Door:’ Intel’s video series shows viewers a critical piece of Intel manufacturing: an EUV — or extreme ultraviolet — lithography system.




In Intel’s second “Behind this Door” video, take a sneak peek into fab D1X in Oregon to see what is likely the most complicated machine humans have built.

An extreme ultraviolet (EUV) lithography system uses radically shorter wavelengths to project circuit patterns onto silicon wafers — wavelengths at 13.5 nanometers, or more than 10 times smaller than today’s lithography machines. The EUV machine pushes Moore’s Law forward and chip makers cannot produce leading-edge chips without it.

Delivering just one of these tools to D1X takes three Boeing 747 cargo planes, 40 freight containers and 20 trucks. The school bus-sized machine comprises 100,000 parts and weighs nearly 200 tons.

ASML makes these EUV machines. The Dutch company is currently working on the next-generation of the tool — and Intel is in line to receive one.

More “Behind this Door:” Floating School-Bus Sized Tools and More: Tour Two Intel Factories

Notice: This video contains footage provided by external vendors who have their own safety and health policies. Moreover, some footage was recorded prior to the COVID outbreak when no pandemic-related mask or social-distancing policies were needed or in place.