Due to a problem in the Intel® Quartus® Prime Pro Edition Software version 22.3 and earlier, you may see this internal error when you open the Chip Planner. This is caused by the incompatible device migration found in the project, and you will see a similar error message stated in the Message window:
Error: Found incompatible or illegal device migration for the targeted device:
Error: <device name>
To work around this problem, remove the incompatible device parts in the .qsf file.
This problem is fixed starting with the Intel® Quartus® Prime Pro Edition Software version 22.4.