Due to a problem in the Quartus® II software version 10.1 or later, this error may be generated when running the qmegawiz command on Linux. This error may occur when you run the qmegawiz command with the -f:<parameter file> option if the specified parameter file uses both carriage return (CR or '\r') and line feed (LF or '\n') characters at the end of each line. Both of these characters may be inserted if the parameter file was created on a Windows system before the file was transferred to a Linux system.
To work around this error, change the parameter file to use only the LF or '\n' character at the end of each line. The dos2unix command is available on most Linux systems and can do this conversion automatically.