21st Century Semiconductor Manufacturing Capabilities (continued)


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Acknowledgments

I would like to thank Gordon Moore, Karl Kempf, Court Hilton, Sri Sridharan, Scot Ruska, Bruce Sohn and John Birchak for valuable discussions that helped formulate the concepts discussed in this paper.

References

  1. Gordon Moore, Electronic Materials Symposium Santa Clara, CA, March 1998.

  2. "Next Generation Manufacturing: A Framework for Action," Agility Forum, Bethlehem, PA, 1997.



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