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Intel's 45nm CMOS Technology
45nm Design for Manufacturing
SUMMARY
Our 45nm technology maintains Moore's Law on a technology with a new transistor technology and dry 193nm lithography. Transistor density is on the 2x trend line and variation scaled. Poly rules were changed to allow simple one-pitch poly patterning with no impact to transistor density or product performance. Extensive modeling of the rules provided design rules that were stable before first product tape-out and robust enough to allow a fast high-volume technology ramp.
