Technology with the Environment in Mind

Evaluation Process for Semiconductor Fabrication Materials that are Better for the Environment

INTEGRATION WITHIN INTEL

The final parts of the GFM EHS system are a Regulatory Early Screening process, EHS elements in the general Materials Risk Assessment, and integration of the GFM results into Intel's overall EHS material evaluation and risk mitigation process. At this stage of technology development, a list of candidate materials is created that focuses the development and EHS systems on likely chemicals for the new generation of technology.

Early Screening

GFM developed and implemented a regulatory early screening procedure to proactively evaluate and mitigate associated risks identified through government authorities responsible for approving new chemicals for the industrial market. The scope of early screening covers all legacy materials as well as potential candidate chemicals for the new technology. This analysis is done in conjunction with Intel suppliers who develop the EHS and industrial application information portfolio for their materials. Since requirements vary with regard to both the location of chemical manufacturing and the final location for semiconductor manufacturing, this screening can include multiple schemes of data and information from various geographies (e.g., U.S. Toxic Substances Control Act, Korean Toxic Substances Control Act, etc.).

Materials Risk Assessment

Another key responsibility of Intel GFM-EHS is to ensure that regulatory or EHS constraints in the Fab materials supply chain are mitigated prior to chip high-volume manufacturing (HVM) proliferation. Failure to comply with regulatory requirements can lead to prohibition of materials shipment to the factories. Lack of proper EHS risk evaluation of materials before HVM use may result in last-minute risk mitigation actions being required as the new semiconductor technology is ready for delivery to HVM facilities.

A Materials Risk Assessment (MRA) program is utilized to determine and then mitigate potential risk in materials EHS readiness and regulatory compliance. Throughout the development lifetime of each new technology, any issues identified through the MRA evaluation are logged, mitigation actions are identified, and a completion plan is implemented to manage each issue identified.

Internal Collaboration with Intel's EHS Cross-site HVM Review Process

Intel policy requires a comprehensive EHS review of all chemicals identified for use at Intel. GFM development and procurement experts and evaluators in EHS departments across the company all work closely to achieve the Intel EHS mission. Materials evaluation is conducted before the first sample shipment to an Intel facility. The evaluation starts with a thorough chemical EHS characterization including, but not limited to, environmental impacts, human health and toxicity hazards, and occupational safety considerations. This review builds upon the information compiled during GFM's development and supply chain efforts, and it extends analysis to site-specific environmental, health, safety, and waste issues. The GFM system dovetails with the EHS organization's program at this stage, resulting in a complete EHS materials program from concept to technology end-of-life.

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