Technology with the Environment in Mind

Evaluation Process for Semiconductor Fabrication Materials that are Better for the Environment

DIRECT SUPPLIER ENGAGEMENT

Addressing EHS concerns and issues successfully for the long-term sustainability of our industry requires close collaboration with Intel's suppliers. Furthermore, integrating EHS into the design of new chemicals is generally easiest in the early stages of development (see Figure 3). This is also one of the challenges stated in the ITRS. The specific challenge is a lack of timely information flowing to the technology teams about the EHS characteristics of new materials in order to help minimize the EHS impact of chemicals used.

Figure 3: Integrating EHS into the design of new chemicals
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One of the Intel GFM's goals is to close the chemical data gap by ensuring that Intel's chemical suppliers generate, distribute, and communicate information on chemical toxicity. Chemical suppliers are best equipped to acquire and provide this information and in some instances are required to do so by law. This is seen as necessary to meet the requirements of the European Union Registration, Evaluation, Authorization and potential Restrictions of Chemicals (REACH) legislation. REACH represents the EU's effort to address long-standing deficiencies in chemical information.

An electronic template was developed through collaboration between semiconductor manufacturers and suppliers that allows suppliers to provide specific EHS information data sets as a condition of the purchase of the chemicals. This information is then used to make risk-based chemical decisions to enable the use of the chemistry. In addition, we have certain basic supplier guidelines for developing new chemicals [3].

On an annual basis, Intel GFM EHS communicates with supplier executives on EHS expectations and exchanges information regarding EHS trends and issues at Intel Supplier Day. In 2006 for example, Intel provided pertinent information on the new REACH regulation that communicated the primary supplier requirements to ensure a continued supply of chemicals to Intel's European operations. We provided information on the new international mandate for a globally harmonized hazard classification and compatible labeling system, including material safety data sheets (MSDS) and easily understandable symbols. Intel also provided information on the new global restriction of hazardous substances regulations and Intel's supplier intellectual property management systems. Intel Material Supplier Day presentations are an effective mechanism to engage supplier executives outside traditional supplier-to-customer relationships.

Intense competition for chemical market share makes the security of intellectual property (IP) a critical component of supplier management. Simultaneously, accurate and timely disclosure of EHS data for proprietary chemical ingredients is crucial for a comprehensive EHS risk assessment and avoidance of any current and future regulatory consequences. A mechanism was developed by Intel's GFM and EHS groups to improve the flow of EHS data to ensure the safe use of chemicals while simultaneously improving the protection of suppliers' IP. This mechanism, the Supplier EHS IP Management System (SEIMS), is a data management application for EHS-related documents containing supplier intellectual property. These are some of its key features:

• Design to enhance the security of suppliers' IP and limiting dissemination within Intel to only those with a need-to-know to make sure that chemicals can be used safely.
• Ensures appropriate and secure document management within Intel.
• Enables supplier document submission online to Intel, eliminating the inefficiency and security issues of manual document management.
• Intel personnel without a need-to-know are unable to view, physically control, or manipulate the supplier's IP.

Chemical suppliers play a vital role in our quest toward greener chemistry and sustainable manufacturing. On a proprietary basis, Intel identifies areas where specific EHS concerns with certain materials exist, and we coordinate closely with suppliers to develop material solutions where both technical and EHS needs can be met.

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