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Technology with the Environment in Mind
Evaluation Process for Semiconductor Fabrication Materials that are Better for the Environment
Victor Fan, Technology and Manufacturing Group, Intel Corporation
David Harman, Technology and Manufacturing Group, Intel Corporation
Jim Jewett, Technology and Manufacturing Group, Intel Corporation
Bob Leet, Technology and Manufacturing Group, Intel Corporation
Dawn Speranza, Technology and Manufacturing Group, Intel Corporation
Index Words: chemical, environment, fab, health, materials, safety, selection, semiconductor
Citations for this paper. Fan, V.; Harman, D.; Jewett, J.; Leet, J.; Speranza, D. "Evaluation Process for Semiconductor Fabrication Materials that are Better for the Environment." Intel Technology Journal.
http://www.intel.com/technology/itj/2008/
v12i1/7-evaluation/1-abstract.htm (February 2008).
ABSTRACT
The successful future of the semiconductor industry is dependent upon the development of an array of new and novel materials to make semiconductor devices. In parallel, there is a growing sentiment in public policy and regulatory forums for a highly conservative precautionary approach to approving the introduction of new chemicals into commerce. Intel's business model of Copy Exactly! requires new material development very early in the technology development cycle. Therefore, Intel's approach to chemical development, and selection of materials, must incorporate consideration of the environmental impact of its policies and materials extremely early.
Prior to the selection and purchase of Fab manufacturing materials at Intel, procedures are in place at the development and selection stages to integrate consideration of the materials' impact on the environment, to collaborate with suppliers and others to reduce that impact, and at the same time to meet Intel's technology needs. In this paper, we provide an overview of what drives the procedures used by Global Fab materials, we look at how the procedures are used, and we look at the successful results through a case study.
