Robert S. Chau
Intel Senior Fellow, Technology and Manufacturing Group
Director, Transistor Research and Nanotechnology
INTEL CORPORATION
Robert S. Chau is an Intel Senior Fellow and director of transistor research and nanotechnology in Intel's Technology and Manufacturing Group. Chau is responsible for directing research and development in advanced transistors and gate dielectrics, process modules and technologies, and silicon integrated processes for microprocessor applications. He is also responsible for leading research efforts in emerging nanotechnology for future nanoelectronics applications.
Chau joined Intel in 1989, became an Intel Fellow in 2000 and an Intel Senior Fellow in 2005. During his career at Intel he developed nine generations of Intel gate dielectrics, including the high-K/metal-gate, along with many transistor innovations and process technologies used in various Intel manufacturing processes and microprocessor products. He also introduced many new process modules and novel device nanotechnologies for Intel's future logic processes.
Chau received his bachelor's and master's degrees and Ph.D. in electrical engineering from The Ohio State University. He holds more than 110 issued U.S. patents and has been elected an IEEE Fellow.
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