Hello, I'm Sheila. Welcome to the Planarisation area, also known as Planar for short.
In the Planar area, we polish the surface of the wafer to give a planar or smooth finish.
We load the wafers into a planar tool where a robot places them between two pads on the tool. The pads rotate and a chemical is introduced which helps to remove the top surface leaving a smooth planar finish. We then load the wafers into another tool which cleans the chemical off using rotating brushes and water. The wafers now move on to the Lithography area.
