Semiconductor fabrication technologies draw upon a wide variety of disciplines, and rest upon a correspondingly diverse scientific and mathematical base. This fact makes it difficult for any one department to claim ownership. Consequently, few courses on device fabrication address "process science": the scientific and mathematical fundamentals underlying the design and optimization of basic plasma and thermal processes. For example, students may learn about the practical aspects of chemical vapor deposition (CVD), but rarely learn about the chemistry and transport phenomena that govern CVD or how a CVD process might be optimized based on fundamental principles. Thus, graduating students who enter a semiconductor manufacturing environment typically lack key aspects of the background needed to work effectively. The Microelectronic Fabrication Curriculum presents a lecture and a laboratory course designed specifically to meet this need by fitting flexibly within an informal option in microelectronic processing.

The Intel Higher Education Program would like to recognize Dr. Edmund Seebauer for his creation of these classes and multi-disciplinary curriculum. Dr. Seebauer resides at the University of Illinois - Champaign-Urbana, Department of Chemical Engineering.

General Overview

Presentation outlining the philosophy of interdisciplinary education in semiconductor fabrication for undergraduate/graduate students: Microelectronics Fabrication

Class Overviews

Each class overview includes the following elements:

• Syllabus and course expectations
• Presentation outlining the class structure and setup
• Lecture, exam and homework examples as applicable

Lecture Course: ChBE 393/469A - Chemistry and Transport in Microelectronic Processing
Lab Course: ChBE 396/469D - Chemistry and Transport in Semiconductor Materials Synthesis