This is a laboratory course for chemical engineers, electrical engineers and chemists interested in chemical processing principles applied to microelectronic device fabrication. Key concepts originate from chemical kinetics; thermodynamics; mass and energy balances; transport of mass, momentum, and heat; and process synthesis and integration. Minimal prior training in microelectronics or chemistry is assumed. The course offers in-depth treatment of a limited number of experiments, with a substantial component of open-ended experimental design. Some experiments will be supplemented with commercial-grade computational modules set up not only to correlate and explain experimental results, but also to offer possibilities for design.
Presentation on how class has been developed and shared experience on teaching the course. Read more.