Addressing Cross-Discipline Semiconductor Fabrication Technologies
Semiconductor fabrication technologies draw upon a wide variety of disciplines, and rest upon a correspondingly diverse scientific and mathematical base. This fact makes it difficult for any one department to claim ownership. Consequently, few courses on device fabrication address "process science": the scientific and mathematical fundamentals underlying the design and optimization of basic plasma and thermal processes. For example, students may learn about the practical aspects of chemical vapor deposition (CVD), but rarely learn about the chemistry and transport phenomena that govern CVD or how a CVD process might be optimized based on fundamental principles. Thus, graduating students who enter a semiconductor manufacturing environment typically lack key aspects of the background needed to work effectively. The Microelectronic Fabrication Curriculum presents a lecture and a laboratory course designed specifically to meet this need by fitting flexibly within an informal option in microelectronic processing.
The Intel Higher Education Program would like to recognize Dr. Edmund Seebauer for his creation of these classes and multi-disciplinary curriculum. Dr. Seebauer resides at the University of Illinois - Champaign-Urbana, Department of Chemical Engineering.
For a copy of the presentation outlining the philosophy of interdisciplinary education in semiconductor fabrication for undergraduate/graduate students, contact Intel Higher Ed Customer Support. Include your name, email address and university name. In the subject line, please include “Microelectronics Fab Overview”.
Each class overview includes the following elements:
- Syllabus and course expectations
- Presentation outlining the class structure and setup
- Lecture, exam and homework examples as applicable
ChBE 393/469A - Chemistry and Transport in Microelectronic Processing
This course is an introductory survey for chemical and electrical engineers of chemical processing principles applied to microelectronic device fabrication. Key concepts originate from chemical kinetics; thermodynamics; mass and energy balances; transport of mass, momentum, and heat; and process synthesis and integration. The course assumes a minimal prior training in chemistry, and is may serve as an ECE technical elective.
Format: One Lecture per Class Session, Original course taught twice weekly. Exam's replace lectures during scheduled class sessions.
Required Text: The Science and Engineering of Microelectronic Fabrication, S. A. Campbell, Oxford, 2nd ed., 2001.
The following assets are available from Intel Higher Education Customer Support . Course overview, complete syllabus, lectures, exams and homework. In the email include your name, email, and university name. Please put “ChBE 393/469A assets” in the subject line.
Lab Course: ChBE 396/469D - Chemistry and Transport in Semiconductor Materials Synthesis
This is a laboratory course for chemical engineers, electrical engineers and chemists interested in chemical processing principles applied to microelectronic device fabrication. Key concepts originate from chemical kinetics; thermodynamics; mass and energy balances; transport of mass, momentum, and heat; and process synthesis and integration. Minimal prior training in microelectronics or chemistry is assumed. The course offers in-depth treatment of a limited number of experiments, with a substantial component of open-ended experimental design. Some experiments will be supplemented with commercial-grade computational modules set up not only to correlate and explain experimental results, but also to offer possibilities for design.
For a course overview, syllabus and lab final exam, contact Intel Higher Education Customer Support with your name, email address, and university. Include “Lab Course: ChBE 396/469D” in the subject line.